The MPI TS300 series is a manual probe station with a 300mm manual probe system. Its manual probe system is open, easy to use, cost-effective, and highly accurate. This system is designed for precise analysis of substrates and wafers up to 300mm. It can be configured to support various applications such as fault analysis, design validation/IC engineering, wafer level reliability, MEMS， High power and device characterization and modeling.

2、 Product Description

1. Single machine multi application design

Suitable for various wafer measurement applications, such as component characterization and modeling, wafer level reliability (WLR), failure analysis (FA), integrated circuit engineering, microelectromechanical systems (MEMS), and high power (HP)

2. ergonomic design

Design of a quick release and drag air floating platform for convenient one handed operation

Durable workbench capable of carrying up to 10 DC or 4 RF micro locators

Three stage workbench quick lift handle design (contact separation loading), achieving high reproducibility

3. Elastic selection and upgradability

There are also various wafer stages that can be upgraded, and many accessories such as DC/RF/mmW micro locators, optical microscopes, imaging lenses, electromagnetic shielding boxes, etc. can be installed to fully support application needs.

3、 Characteristics and advantages

1. Air stage

The TS300's unique air bearing platform design, simple one handed disc control, provides unparalleled operational convenience, enabling fast XY navigation and fast wafer loading without affecting precise and accurate positioning capabilities, and features an additional fine and precise 25x25mm XY Theta micrometer movement.

2. Hover control with probe ™ The pressure plate lifting

The measurement accuracy first depends on the contact quality! The highly repeatable (1 μ m) pressure plate lifting design features three discrete positions for contact, separation (300 μ m), and loading (3 mm), with a safety lock utility, all of which are unparalleled features in MPI manual probe systems. These functions can prevent accidental probe or wafer damage, while providing intuitive control and accurate contact positioning. This ability is particularly important in high-frequency and high-power applications to achieve the most accurate measurement results.

Additional Probe Hover Control ™ With a hovering height of 50, 100, or 150 μ m, it is easy and convenient to detect pad alignment.

3. Height adjustment scale

The probe pressure plate has a fine height adjustment of 25 mm to support various applications. The unique 1mm precise scale can directly provide feedback on the current position.

4. Compact and rigid pressure plate design

The compact and sturdy pressure plate design can accommodate up to ten DC or four RF MicroPositioners, meeting various application requirements.

5. Various clamp options

The manual system offers various chuck options to meet different budget and application requirements. Chuck selection includes MPI coaxial or three-axis chucks or various ERS thermal chuck sizes that support temperature measurement up to 300 ℃ - seamless integration of thermal touch controllers for fast and convenient access and operation as described in the embodiments.

6. Auxiliary chuck

The RF chuck includes two auxiliary chucks with built-in ceramic materials for precise RF calibration.

7. Various optical and motion options

We offer a variety of optical components and movements, available in stereo for common DC/CV applications or single tube MPI SZ10 or MZ12 for RF configurations. Even high-power optical devices such as Mitutoyo FS70 or Motic PSM-1000 can be used for fault analysis applications.

8. Optical tilt

As a standard feature or even a 90 degree tilt driven by pneumatic means, the linear Z elevator provides very convenient settings and easy to replace probe tips.

9. Vibration isolation platform

All manual systems include a vibration absorbing base, which can achieve stable and reliable long-term contact between the probe and the solder pad, ensuring reliable measurement results. When a large amount of vibration protection is required in the laboratory environment, an isolation platform or workbench can be optionally equipped.

10. DarkBox

The available DarkBox options provide EMI shielding and opaque testing environments, suitable for ultra-low noise DC measurements.

4、 Functional parameters

1. specifications

2. Probe pressure plate

3. Non thermal chuck